Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

IRMM531C

Titanium, IRMM^®, certified reference material, 0.5 mm wire

595063

Sigma-Aldrich

Titanium nitride, <3 μm

IRMM531B

Titanium, IRMM^®, certified reference material, 0.5 mm foil

GF48167590

Titanium, tube, 100mm, outside diameter 6.1mm, inside diameter 5.1mm, wall thickness 0.5mm, annealed, 99.6+%

GF11909932

Titanium, tube, 100mm, outside diameter 4.25mm, inside diameter 3.75mm, wall thickness 0.25mm, annealed, 99.6+%

GF85496664

Titanium, tube, 1000mm, outside diameter 9.5mm, inside diameter 8.2mm, wall thickness 0.65mm, annealed, 99.6+%

GF82517722

Titanium, tube, 1000mm, outside diameter 6.35mm, inside diameter 4.57mm, wall thickness 0.89mm, annealed, 99.6+%

GF32270015

Titanium, tube, 200mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

GF03838282

Titanium, rod, 500mm, diameter 1.5mm, annealed, 99.6+%

GF26602321

Titanium, tube, 500mm, outside diameter 25.4mm, inside diameter 23.62mm, wall thickness 0.89mm, annealed, 99.6+%

GF95731960

Titanium, tube, 500mm, outside diameter 3.0mm, inside diameter 1.5mm, wall thickness 0.75mm, annealed, 99.6+%

GF31085760

Titanium, wire reel, 5m, diameter 0.25mm, as drawn, 99.99+%

GF06813525

Titanium, wire reel, 1m, diameter 0.5mm, as drawn, 99.6+%

GF49264713

Titanium, tube, 200mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF28411703

Titanium, tube, 100mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

GF65515024

Titanium, tube, 1000mm, outside diameter 12.7mm, inside diameter 10.9mm, wall thickness 0.9mm, annealed, 99.6+%

GF62977540

Titanium, tube, 200mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF12929744

Titanium, microfoil, disks, 25mm, thinness 0.25μm, specific density 112.6μg/cm², permanent mylar 3.5μm support, 99.6+%

GF31127712

Titanium, rod, 10mm, diameter 50mm, 99.99+%

GF40775610

Titanium, wire reel, 1m, diameter 0.20mm, annealed, 99.6+%

GF46132534

Titanium, wire reel, 100m, diameter 0.25mm, as drawn, 99.6+%

GF00558187

Titanium, wire reel, 25m, diameter 1.0mm, as drawn, 99.6+%

305812

Sigma-Aldrich

Titanium, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

369489

Sigma-Aldrich

Titanium, foil, thickness 2.0 mm, 99.7% trace metals basis

348848

Sigma-Aldrich

Titanium, foil, thickness 0.025 mm, 99.98% trace metals basis

266035

Sigma-Aldrich

Titanium, wire, diam. 1.0 mm, 99.99% trace metals basis

267902

Sigma-Aldrich

Titanium, wire, diam. 0.81 mm, 99.7% trace metals basis

460400

Sigma-Aldrich

Titanium, wire, diam. 0.25 mm, 99.7% trace metals basis

348791

Sigma-Aldrich

Titanium, foil, thickness 0.127 mm, 99.7% trace metals basis

GF51463357

Titanium, tube, 200mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%